青州市中拓鍍膜機械科技有限公司

 

中拓鍍膜科技

磁控濺射鍍膜機

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磁控濺射鍍膜機




設備技術參數                     Equipment technical parameters
真空室材質                       Vacuum chamber material不銹鋼、碳鋼                                       Stainless steel, carbon steel
蒸鍍方式                         Metalizing mode單面鍍膜、雙面鍍膜                                 Single side coating, double side coating
蒸鍍模式                         Metalizing model磁控濺射                                           Magnetron sputtering
有效鍍寬                         Effective width of coating400mm-1700mm
最大卷徑                         Max.rolling diameter500mm-1300mm
卷繞速度                         Wind speed1m/min ~15m/min(2m/min ~30m/min)
可鍍材料                         Can be plated material銅、鉻、鈦、銀等                                    Cu, Cr, Ti, Ag, etc
鍍膜基材                         Coating substratePET(3.8U-300U)PI(15U-150U)銅、鋁箔、無紡布、紙等各種卷材                                              PET (3.8 u-300u) PI (15u-150u) copper, aluminum foil, non-woven fabric, paper and other coils
常用真空抽氣時間                 Commonly used vacuum extraction time清潔容器抽至8.5×10-3Pa≤30min                       Clean the container until 8.5×10-3pa ≤30min
極限真空抽氣時間                 Limit vacuum time清潔空容器抽至5×10-4Pa≤24h                         Clean empty containers and pump until 5×10-4pa ≤24h
極限壓力(清潔、空載)           Extreme pressure (clean, no load)7×10-4Pa
水冷輥直徑                      Diameter of water-cooled rollφ500mm-φ1200mm
水冷輥冷凍工作溫度               Water cooling roller freezing working temperature-25℃~80℃
離子源                          Ion source線性離子源                                          Linear ion source
靶體形式                        The target body form平面靶、圓柱靶                                      Plane target、 cylindrical target
磁控靶電源                      Magnetic target power supply直流、中頻                                          Dc,if
磁控靶工作壓力                  Magnetic target operating pressure2×10-1Pa
磁控靶工作氣體                  Magnetically controlled target working gas氬氣、氧氣,純度99.99%                               Ar, O2, 99.99% purity
磁控靶工作氣體控制方式           Magnetic target working gas control mode質量流量控制器控制                                   Mass flow controller control
卷繞系統                        The winding system采用西門子變頻恒張力全自動收放卷系統                                                                  Siemens variable frequency constant tension automatic winding and unwinding system is adopted
舒展系統                        Stretch system收卷放卷端各有一條360度可調舒展輥                                                                      There is a 360-degree adjustable stretch roll at each end of winding and unwinding
驅動電機                        Drive motor西門子電機                                           Siemens motor
氣脹軸                          Inflatable shaft脹塊式、鍵條式等                                     Bulk-type, key-bar type, etc
氣脹軸直徑                      Inflation axis diameter3″、 6″氣脹軸                                      3 ", 6 "gas expansion axis
真空系統                         Vacuum systemφ400分子泵,速度3600升/秒                            Phi 400 molecular pump, speed 3600 L/S
ZJ2500羅茨泵,速度2500升/秒                           ZJ2500 roots pump, speed 2500 L/S
2H160滑閥泵,速度160升/秒                              2H160 slide valve pump, speed 160 L/S
冷暖交換機組                                          Heating and cooling exchange unit
深冷捕集器                                            Cryogenic trap
功率                              power90KW-200KW
電源                              The power supply380V  三相五線                                         380V   Three phase five wire


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產品詳情

磁控濺射鍍膜機




設備技術參數                     Equipment technical parameters
真空室材質                       Vacuum chamber material不銹鋼、碳鋼                                       Stainless steel, carbon steel
蒸鍍方式                         Metalizing mode單面鍍膜、雙面鍍膜                                 Single side coating, double side coating
蒸鍍模式                         Metalizing model磁控濺射                                           Magnetron sputtering
有效鍍寬                         Effective width of coating400mm-1700mm
最大卷徑                         Max.rolling diameter500mm-1300mm
卷繞速度                         Wind speed1m/min ~15m/min(2m/min ~30m/min)
可鍍材料                         Can be plated material銅、鉻、鈦、銀等                                    Cu, Cr, Ti, Ag, etc
鍍膜基材                         Coating substratePET(3.8U-300U)PI(15U-150U)銅、鋁箔、無紡布、紙等各種卷材                                              PET (3.8 u-300u) PI (15u-150u) copper, aluminum foil, non-woven fabric, paper and other coils
常用真空抽氣時間                 Commonly used vacuum extraction time清潔容器抽至8.5×10-3Pa≤30min                       Clean the container until 8.5×10-3pa ≤30min
極限真空抽氣時間                 Limit vacuum time清潔空容器抽至5×10-4Pa≤24h                         Clean empty containers and pump until 5×10-4pa ≤24h
極限壓力(清潔、空載)           Extreme pressure (clean, no load)7×10-4Pa
水冷輥直徑                      Diameter of water-cooled rollφ500mm-φ1200mm
水冷輥冷凍工作溫度               Water cooling roller freezing working temperature-25℃~80℃
離子源                          Ion source線性離子源                                          Linear ion source
靶體形式                        The target body form平面靶、圓柱靶                                      Plane target、 cylindrical target
磁控靶電源                      Magnetic target power supply直流、中頻                                          Dc,if
磁控靶工作壓力                  Magnetic target operating pressure2×10-1Pa
磁控靶工作氣體                  Magnetically controlled target working gas氬氣、氧氣,純度99.99%                               Ar, O2, 99.99% purity
磁控靶工作氣體控制方式           Magnetic target working gas control mode質量流量控制器控制                                   Mass flow controller control
卷繞系統                        The winding system采用西門子變頻恒張力全自動收放卷系統                                                                  Siemens variable frequency constant tension automatic winding and unwinding system is adopted
舒展系統                        Stretch system收卷放卷端各有一條360度可調舒展輥                                                                      There is a 360-degree adjustable stretch roll at each end of winding and unwinding
驅動電機                        Drive motor西門子電機                                           Siemens motor
氣脹軸                          Inflatable shaft脹塊式、鍵條式等                                     Bulk-type, key-bar type, etc
氣脹軸直徑                      Inflation axis diameter3″、 6″氣脹軸                                      3 ", 6 "gas expansion axis
真空系統                         Vacuum systemφ400分子泵,速度3600升/秒                            Phi 400 molecular pump, speed 3600 L/S
ZJ2500羅茨泵,速度2500升/秒                           ZJ2500 roots pump, speed 2500 L/S
2H160滑閥泵,速度160升/秒                              2H160 slide valve pump, speed 160 L/S
冷暖交換機組                                          Heating and cooling exchange unit
深冷捕集器                                            Cryogenic trap
功率                              power90KW-200KW
電源                              The power supply380V  三相五線                                         380V   Three phase five wire


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